R&D • Pilot • Production • Custom • High Temperature 2" Wafer Annealer • From Design to Production

Structured Materials Industries, Inc. offers a full line of MOCVD and CVD (SpinCVD™) system technologies for sale, ranging from R&D scale to Pilot to Production. The reactors are designed in such a way that processes can easily be scaled-up to larger reactors once the processes have been qualified. Supporting all SMI designs and assemblies are state of the art Modeling and three dimensional (Solid Works™) pre-construction engineering design (See the Design and Modeling sections). SMI has also recently added static and tape drive CVD tools to its product list. SMI also custom designs for or to customer specifications and application needs. SMI systems provide complete solutions:

• Deposition Reactor module
• Gas & Vapor Delivery module
• Exhaust module
• Process Control module
• Electronics module
• Frames, Utilities and Integration

SMI also provides CVD system kits and components (as described in the component section).

Common System Features
• Scalable rotating susceptor platform – from 3" to 34"
• Fully automatable (Smart CVD™ PC/PLC based control system)
• Conventional CVD and ALD operating modes
• Compatible with plasma and UV enhancement
• In-situ process monitors: temperature – deposition rate – others
• Transfer/load lock or Robotic cluster tool systems available
• Radial reactant distribution control for maximum uniformity, composition control and minimization of depletion
• Reactive species are isolated until they mix above the substrate to minimize pre-reactions
• Customization is encouraged
• All metal construction built to UHV standards
• Leading vendor components used for all standard components (valves, MFC’s, gauges, etc.)
• Only highest quality materials used

SMI offers CVDMicro® and CVDLite® in the research series of its reactors. These scaleable reactors are optimum for research institutes and universities. These are part of the low cost solution for material research. These reactors are capable of deposition from 1-2" substrate to 3-2" substrates (larger systems may also be used for R&D. SMI offers various wafer carrier designs to accommodate researcher’s needs. Height adjustable showerhead versions are available and supported with a streamlined gas panel.

For further details, please contact sales@structuredmaterials.com

SMI offers Epic® series of reactors for pilot production. These reactors are a perfect solution for an economical way of doing pilot production. SMI recommends 4 sided cluster tool robot configuration for processes with short deposition time and also provides linear transfer system reactors for long deposition growth processes. These reactors are also available with clean/etch stations as options. They are capable of growing 3 –4" substrates, 1-6" substrates, or 1-8" substrates.

For further details, please contact sales@structuredmaterials.com

SMI offers Legend® series of reactors for production customers. These reactors are very application specific and made for high through put at low cost. SMI recommends 6 sided cluster tool robot configuration. These reactors are compatible with other modules. They are capable of growing on 1-6" substrates, 1-8" substrates, or 1-12" substrates (5-6" and 3-8" versions are available).

For further details, please contact sales@structuredmaterials.com

At SMI, we pride ourselves in accommodating any customer specific reactor needs. We are also able to enhance our reactors with Plasma and UV for different deposition modes. SMI is capable of configuring the reactors for complex geometry coatings and also capable of researching alternative heating systems.

Static, Plasma Enhanced and Height Adjustable Showerhead Systems
SMI offers a line of static (non-rotating) CVD reactors. These systems are ideal for researchers investigating plasma enhanced processes and new chemistries. Reactors supporting 4”, 6”, 8” and 12” diameter wafers are available. Height adjustable showerheads are also an option in these systems.

Conformal Large Shape Coating Tools are also available
SMI also offers conformal large shape coating tools for Optical, Tribological, and other CVD applications.

For further details, please contact sales@structuredmaterials.com