• Introducing the GaNomite™ A new series of SpinCVD™ reactors and systems for GaN film deposition.

• Custom Frames A complete line of frame design and manufacturing capabilities focused on supporting advanced research and manufacturing tools.

Brochures

SMI

Services

Spin CVD™: SMI System Assemblies

Ganomite

Dragon

Hollow Cathode Gas Flow

Material & Process Development and Material Demonstration

Featured Material: Zn(Mg)O

Perovskite Complex Oxide Films by SpinCVD™

Flash Evaporators and Liquid/Vapor Delivery Systems

SMI Vapor Delivery Systems


Technical Monographs

MOCVD of GeSbTe-based Chalcogenide Thin Films

Chalcogenides for Phase Change Memory Applications

Vacumn and Coating Magazine - Preparation of Complex Oxide Thin Films by MOCVD

Large Area Multi-Wafer MOCVD of Transparent and Conducting ZnO Films

MOCVD Pocess Model for Deposition of Complex Oxide Ferroelectric Thin Films

Metal Organic Chermical Vapor Deposition of Oxide Films for Advanced Applications

Interactive Process Control Industrial Computer System (ICCS) for MOCVD and Other Process Systems

Laser annealing of MOCVD Deposited Ferroelectric SrBi2Ta2O9, Pb(ZrxTi1-x)O3, and CeMnO3 Thin Films