SMI Processes

Working closely with customers, collaborators (government or commercial) and on our own, SMI has developed a wide array of process technology and process technology development capability. Processes are developed at the R&D level as well as at the production level. Our in-house tools and experience well position us to help with confidential customer process development needs. Below are listed some processes we have developed.

Example Applications for all your MOCVD needs!

Displays (TCOs, OLEDs, LEDs, Detectors, Heaters, Phosphors) Memory (DRAM, NVRAM, PRAM) Opto-electronics/Waveguides/photoptics, MEMS/MOEMS Dielectrics Pyroelectrics, Barriers, Conductors/Electrodes, Passivation coatings, Superconductors, Thin Film Batteries

Examples of SMI Process Development
Ferroelectrics such as PZT BST, BLT, and CMO™ (among others) are in production for nonvolatile memories. Working with strategic partners, SMI has demonstrated MOCVD of an array of ferroelectrics – including the invention of a new CexMnyO3 (CMO™) ferroelectric that is directly compatible with silicon.

Transparent Conductive Oxide Indium tin Oxide (ITO) and ZnO, among others, are used in an array of applications that require transparency and conductivity, along with nontransparent conductor applications – SMI has developed several transparent and conductive MOVCD films. Applications range from GaN LED contact layers to solar cells to liquid crystal display contacts and heaters to alternative TCO’s for OLEDs and so on. A few such applications are shown below.
ZnO Etched Display Plate and Working Electronics	Transparent Heater Stability and Lifetime

Epitaxial Oxides Several single or multilayer structures have been developed for subsequent depositions of films (i.e. Al₂O₃/ZnO or GaN/ZnO). Heteroepsitoxy structures have also been demonstrated Oxides Al₂O₃/ZnO Cross Section	Phosphors Thin contiguous film phosphors have specialty applications for scintilators, cathodoluminescent and Electroluminescent applications. SMI has worked with an array of MOCVD phosphor films – including those doped with Ce, Er, and Mn among others.
Waveguide and Electro-Optics Waveguides and electro-optics are cornerstones of the present photonics industry. SMI has several programs related to LiNbO and PZT films. SEMs of y-branch waveguide portion of MZ modulator and overlaid electrode pattern.
Photonic Crystals and Negative Index Materials Unique 3-dimensional (3-D) structures widely vary photonic interactions and hence optical properties. SMI films are being advanced in several photonic structures. Pyroelectrics A range of oxide films that use have deposited exhibit pyroelectric effects, which can be used in IR sensing and imaging applications. Dielectrics SMI processes for dielectrics (Hf(Si)O, Zr(Si)O, TaO, and so on).	Silicon Photonics The integration of the power of Si electronics with photonics is a highly desired innovation in photonic device development. SMI has multiple material and device development efforts in this field. Optical Coatings SMI has applied CVD to make multi-layer dielectric optical filters and mirrors on flat and complex shapes, including high temperature optical coatings. Superconductors SMI has developed processes and components for superconducting films (YBCO). Thin Film Batteries SMI has developed processes and components for thin film battery electrodes (LiCoO). Other SMI is developing a wide range of other oxides, including passivation and barrier layers (Al2O3), Cr2O3, trilogical and protective oxides and so on.

Nitrides/Carbides/Organics SMI now provides custom nitride, carbide, and other film deposition tools. These tools are ideal for economical research and development.

Si Quantum Dots SMI has developed a process for making Si (or Ge) quantum dots in oxides. Such films may be doped with rare earth ions to modify special properties.

Radiation Hard Memories and Radiation Soft Detector Chips and Electronics Through several material development efforts, SMI’s materials and processes are being applied to both Radiation Hard Memories and Radiation Soft Detectors. We also represent radiation upscreening services to our collaborators.

New Attenuating Layer Deposition and Other Processes New processes are constantly under development at SMI. Examples include: Spin ALD™ where in layers are alternatively deposited by controlling the chemistry and or the flows: where vapors are “jettered” Jet spin CVD™ into the uniform flow; plasma, UV and laser enhanced depositions; among others.