SMI has developed CVD processes for a wide range of oxide materials and implemented them in both simple and complex multilayer structures. The figure below shows the diverse and growing range of materials actually deposited and compatible with our deposition technology.
In practice, if it is on the chart and a precursor (a vaporizable compound) exists for the material, then we can produce a process to deposit it.

In the table below we list many of the applications that SMI CVD tools have produced materials for.

The SMI broad experience base in materials makes SMI an ideal choice for teaming with customers to provide answers to their research or product needs.

Please contact SMI at sales@structuredmaterials.com with any questions and we will work with you to provide the best solutions to your deposition needs.
SMI CVD Applications & Materials
Devices and applications include nonvolatile memories, sensors, detectors, capacitors, barriers, dielectrics, insulators, waveguides, optoelectronics, conductive oxides, luminescent oxides, phospors, piezoelectrics, pyroelectrics, switches, OLED, displays, resistors, solar cells, fuses, imaging radiation hardend devices, and many others.
Transparent Conductive Oxides (TCO’s)
LCDisplay Controls • Solar Cells
Transparent Heaters • Electrodes
Alternative TCO’s for OLEDs
Transparent Devices (LED, Detector, Transistor)
PZnO, ITO, SrCuO,
MgAlO,SrRuOm and
many others.
MEMS & MOEMs
Photoptics • Waveguides
Switches • Electro-optics
Interferometers • Sensor/detectors
Structural Electromechanicals		 PZT, ZrO, NbO,
LiNbO, TiO2
SiO2
PbMgO, CMO
Ta2O5
MEMORIES (DRAM & NVRAM) Dielectrics/Passivation
Gate or other Dielectrics • Capacitor Layers
Ferroelectric • High Frequency Devices
Passivations • Barriers		 BST
PZT, SBT, CMO, BLT
Hf(Si)O, Ta2O5,
Zr(Si)O,
Al2O3, MgO
Waveguides, Electrooptics, WDMs. MOEMS etc.
Photoptics • Switches
Waveguides • Photoelectonics
Electro-optics		 YBCO, PZT, ZnO,
ZnSiO:Mn, GaN
SiC, Al, W, Cn, and so
on.
Other Films
Superconductors • Nitrides
Pyroelectics Contact • Oxides
Phosphors • Magnetic		 YBCO, PZT, ZnO,
ZnSiO:Mn, GaN
SiC, Al, W, Cn, and so
on.
.