SMI offers a user friendly real time SmartCVD Interactive Process Control Industrial system for MOCVD. The systems utilizes spreadsheet format run programing that includes ramp and looping functions. Recipes are easily editable for efficient programing. Other features include a real-time mimic screen of all process components as the primary system operator interface for fully automated sequential layer by layer operation, maintenance routines, manual servicing operation, operator re-configurable parameters, process trend monitors, and safely/alarm capabilities. The system uses an industrial computer and PLC Controller for maximum reliability. Importantly, this control system interfaces with all common in-situ process monitors (optical, RGA, and so on), offers remote access and is provided with training software.
	.