• III-V to Oxide
• Nitride to Oxide
Structured Materials Industries, Inc. provides specialized engineering services to Convert existing MOCVD equipment from one material system to another. SMI has a long history in manufacturing MOCVD tools and components and has now extended this capability to enable customers to economically adapt pre-existing MOCVD equipment from one material system to another. Examples are the conversion of excess III-V production MOCVD tools to meet oxide contact layer deposition needs, the conversion of excess nitride tool to pursue ZnO research and development, and conversion of excess III-V tools to II-VI materials. Alternatively, systems can be converted to incorporate plasma or UV enhancement. This service extends to tools from all MOCVD vendors as well as to enhancing existing home-built R&D systems.
Rotating Disc Reactors
• Emcore/Veeco
• Thomas Swan• Many others
Non-Rotating Disc Reactors
• Aixtron
• Many others
Homebuilt reactors/Systems
• Horizontal tube
• Vertical static
• Other
Gas Delivery Systems
• Bubbler, Sublimator, Gas, and Flash Evaporator Sources
• Purifiers
• Switching Manifolds
• Dopant Dilution Manifolds
• Pressure Control
Control Systems
• To mimic screen/spreadsheet format
Exhaust Systems
• Reducing atmospheres to oxidizing atmospheres
• Oxidizing atmospheres to reducing atmospheres
New Environment Compatible Spare Parts